Using CMP Model for 45nm/32nm BEOL Process and Design Evaluations
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2020 ◽
Vol 11
(3)
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pp. 697-711
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2015 ◽
Vol 30
(8)
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pp. 926-938
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2016 ◽
Vol 77
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pp. 90-101
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2020 ◽
Vol 20
(3)
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pp. 04020013
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