MEMS Process by Film Transfer Using Fluorocarbon Anti-Adhesive Layer
2011 ◽
Vol 158
(5)
◽
pp. H545
◽
2010 ◽
Vol 16
(7)
◽
pp. 1277-1284
◽
2010 ◽
Vol 97-101
◽
pp. 3920-3923
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Keyword(s):
2021 ◽
Vol 106
◽
pp. 102817