Optical Characterization of Surface Profiles of Various Si1-xGex/Si Wafers Before and After Annealing Step
1985 ◽
Vol 125
(3-4)
◽
pp. 235-241
◽
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1973 ◽
Vol 31
◽
pp. 32-33
◽
2020 ◽
Vol 12
(4)
◽
pp. 04022-1-04022-4
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