Wafer-Area-Saving Test Structures and Measurement Method for the Characterization of Interconnect Resistance and Capacitance in Nanometer Technologies
2018 ◽
Vol 17
(3)
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pp. 274-285
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Keyword(s):
2013 ◽
Vol 4
(1)
◽
pp. 21-26
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Keyword(s):
2013 ◽
Vol 49
(11)
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pp. 3548-3560
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