scholarly journals Growth of Metal Nanowhiskers on Patterned Substrate by High Temperature Glancing Angle Deposition

2010 ◽  
Vol 157 (2) ◽  
pp. K34 ◽  
Author(s):  
Motofumi Suzuki ◽  
Ryo Kita ◽  
Hideki Hara ◽  
Kenji Hamachi ◽  
Koji Nagai ◽  
...  
Keyword(s):  
High Temperature ◽  
Glancing Angle Deposition ◽  
Patterned Substrate ◽  
Glancing Angle ◽  
Angle Deposition

scholarly journals Growth of Metal Nanowhiskers on Patterned Substrate by High-Temperature Glancing Angle Deposition

2019 ◽  
Vol 25 (10) ◽  
pp. 29-39
Author(s):  
Motofumi Suzuki ◽  
Hideki Hara ◽  
Ryo Kita ◽  
Kenji Hamachi ◽  
Koji Nagai ◽  
...  
Keyword(s):  
High Temperature ◽  
Glancing Angle Deposition ◽  
Patterned Substrate ◽  
Glancing Angle ◽  
Angle Deposition

Selective Growth of Al Nanowhiskers on the Patterned Substrate by Glancing Angle Deposition at High Temperature

2007 ◽  
Vol 1054 ◽  
Author(s):  
Motofumi Suzuki ◽  
Ryo Kita ◽  
Kenji Hamachi ◽  
Koji Nagai ◽  
Kaoru Nakajima ◽  
...  
Keyword(s):  
High Temperature ◽  
Glancing Angle Deposition ◽  
Transport Processes ◽  
Selective Growth ◽  
The Other ◽  
Shadow Region ◽  
Patterned Substrate ◽  
Glancing Angle ◽  
Angle Deposition ◽  
Deposition Conditions

ABSTRACTWe demonstrated high temperature glancing deposition (HT-GLAD) of Al on the heated substrate with trench patterns. When Al was deposited under the condition, where the Al vapor is incident at very glancing on the sidewall but on the surface, Al nano-whiskers grew only on the sidewall of the trenches since HT-GLAD condition is achieved only for the sidewall. On the other, Al was deposited at glancing angle both on the surface and the sidewalls, nano-whiskers grow both on the surface and the sidewalls of the trenches. The selective growth of the nano-whisker is successfully achieved by controlling the geometrical deposition conditions. Remarkably, moreover, the nano-whiskers grow not only on the illuminated sidewalls but also on the shadow sidewall. In addition, few nano-whiskers grow on the shadow region of the bottom of the trenches. In order to understand the peculiar growth of Al nano-whiskers, novel transport processes of Al atoms other than the surface diffusion have to be clarified. The reevaporation or reflective scattering on the sidewalls of the trenches is likely to play an important role in the growth of nano-whiskers.

Growth of Nanowires by High-Temperature Glancing Angle Deposition

2013 ◽  
Vol 52 (11R) ◽  
pp. 110116
Author(s):  
Motofumi Suzuki ◽  
Haruhiko Minamitake ◽  
Ryo Kita ◽  
Kenji Hamachi ◽  
Hideki Hara ◽  
...  
Keyword(s):  
High Temperature ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition

Effect of the Surface Nanomorphology on the Growth of Al Whiskers Formed by Glancing Angle Deposition on a High Temperature Substrate

2007 ◽  
Vol 1059 ◽  
Author(s):  
Kenji Hamachi ◽  
Motofumi Suzuki ◽  
Kaoru Nakajima ◽  
Kenji Kimura
Keyword(s):  
High Temperature ◽  
Surface Morphology ◽  
Substrate Surface ◽  
Side Surface ◽  
Glancing Angle Deposition ◽  
Transport Processes ◽  
The Other ◽  
Glancing Angle ◽  
20 Nm ◽  
Angle Deposition

ABSTRACTWe have investigated the effect of the substrate-surface morphology on the growth of Al whiskers grown by high temperature glancing angle deposition (HT-GLAD). Before the HT-GLAD of Al at 390 °C, the morphology of the substrate was systematically modified by depositing nanocolumnar SiO2 layer of thickness between 0 and 100 nm on the flat SiO2 layer. Aluminum whiskers with the width of ≈100 nm and the length ≤ μm are found on all the samples. The number of short whiskers, which can be grown from very small nuclei, depends strongly on the thickness of the SiO2 nanocolumnar layer and shows the maximum at SiO2 thickness of 20 nm. On the other hand, the number of long whiskers, which requires extraordinary amount of Al than that deposited on the side surface of the whikers, is almost independent of SiO2 thickness. These facts suggest that the surface roughness of the substrate plays an important role in the nucleation of the whiskers and that there are some transport processes of Al, which are insensitive to the surface morphology.

scholarly journals Vapor phase growth of Al whiskers induced by glancing angle deposition at high temperature

2006 ◽  
Vol 89 (13) ◽  
pp. 133103 ◽  
Author(s):  
Motofumi Suzuki ◽  
Koji Nagai ◽  
Sadamu Kinoshita ◽  
Kaoru Nakajima ◽  
Kenji Kimura ◽  
...  
Keyword(s):  
High Temperature ◽  
Vapor Phase ◽  
Glancing Angle Deposition ◽  
Phase Growth ◽  
Vapor Phase Growth ◽  
Glancing Angle ◽  
Angle Deposition

Growth of Nanowhiskers of Al, Ti, Cr, Mn, Fe, Co, Ni, Zn, Cu, Ag and Au by High-Temperature Glancing Angle Deposition

2019 ◽  
Vol 33 (9) ◽  
pp. 41-48 ◽  
Author(s):  
Motofumi Suzuki ◽  
Kenji Hamachi ◽  
Koji Nagai ◽  
Ryo Kita ◽  
Kaoru Nakajima ◽  
...  
Keyword(s):  
High Temperature ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition

Metal nanowhiskers synthesized by high-temperature glancing angle deposition

2008 ◽  
Author(s):  
Motofumi Suzuki ◽  
Kenji Hamachi ◽  
Ryo Kita ◽  
Koji Nagai ◽  
Kaoru Nakajima ◽  
...  
Keyword(s):  
High Temperature ◽  
Glancing Angle Deposition ◽  
Glancing Angle ◽  
Angle Deposition
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