Residual Stress Mechanisms in Aluminium Oxide Films Grown by MOCVD
1997 ◽
Vol 39
(6)
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pp. 1109-1118
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2010 ◽
Vol 396
(1)
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pp. 65-70
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Keyword(s):
Keyword(s):
1984 ◽
Vol 49
(3)
◽
pp. 341-352
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Keyword(s):
1995 ◽
Vol 40
(4)
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pp. 433-437
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