Shape Optimization of a Showerhead System for the Control of Growth Uniformity in a MOCVD Reactor Using CFD-based Evolutionary Algorithms
2015 ◽
Vol 52
(3)
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pp. 613-631
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2011 ◽
Vol 46
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pp. 270-276
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2008 ◽
Vol 24
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pp. 701-708
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2011 ◽
Vol 18
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pp. 225-243
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