scholarly journals Shape Optimization of a Showerhead System for the Control of Growth Uniformity in a MOCVD Reactor Using CFD-based Evolutionary Algorithms

2019 ◽  
Vol 25 (8) ◽  
pp. 1053-1060 ◽  
Author(s):  
Theodora C. Xenidou ◽  
Nathalie Prud'Homme ◽  
Lyacine Aloui ◽  
Constantin Vahlas ◽  
Nicholas C. Markatos ◽  
...  
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