Atmospheric Pressure Plasma Enhanced CVD of Fe Nanoparticles

2019 ◽  
Vol 25 (8) ◽  
pp. 943-951 ◽  
Author(s):  
Sergei Alexandrov ◽  
Irina Kretusheva ◽  
Maxim V. Mishin
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Enhanced Cvd ◽  
Pressure Plasma ◽  
Fe Nanoparticles

Atmospheric Pressure Plasma-Enhanced CVD for Surface Modification: Principles and Applications

2006 ◽  
Vol 45 ◽  
pp. 1173-1177 ◽  
Author(s):  
Michael L. Hitchman ◽  
Sergei E. Alexandrov
Keyword(s):  
Surface Modification ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Dielectric Barrier Discharges ◽  
Thermal Nonequilibrium ◽  
Dielectric Barrier ◽  
Nonequilibrium Plasmas ◽  
Plasma Enhanced Cvd ◽  
Pressure Plasma ◽  
Barrier Discharges

This review gives an overview of the characteristics of various non-thermal, nonequilibrium plasmas and outlines results of AP-PECVD with dielectric barrier discharges.

scholarly journals The role of the gradient film properties in silica moisture barriers synthesized in a roll-to-roll atmospheric pressure plasma enhanced CVD reactor

2017 ◽  
Vol 15 (1) ◽  
pp. 1700093 ◽  
Author(s):  
Anna S. Meshkova ◽  
Yaoge Liu ◽  
Fiona M. Elam ◽  
Sergey A. Starostin ◽  
Mauritius C. M. van de Sanden ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Film Properties ◽  
Plasma Enhanced Cvd ◽  
Pressure Plasma ◽  
Roll To Roll ◽  
Moisture Barriers
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