Controlling Copper ECD Processes by Early Fault Detection and Diagnosis Using In-situ Electrochemical Sensor Coupled with Pattern Recognition Chemometrics

Aleksander Jaworski; Hanna Wikiel; Kazimierz Wikiel

doi:10.1149/1.3204408

Controlling Copper ECD Processes by Early Fault Detection and Diagnosis Using In-situ Electrochemical Sensor Coupled with Pattern Recognition Chemometrics

ECS Transactions ◽

10.1149/1.3204408 ◽

2019 ◽

Vol 25 (3) ◽

pp. 199-217 ◽

Cited By ~ 3

Author(s):

Aleksander Jaworski ◽

Hanna Wikiel ◽

Kazimierz Wikiel

Keyword(s):

Pattern Recognition ◽

Fault Detection ◽

Electrochemical Sensor ◽

Fault Detection And Diagnosis ◽

Detection And Diagnosis ◽

Early Fault Detection

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Controlling Copper ECD Processes by Early Fault Detection and Diagnosis Using In-situ Electrochemical Sensor Coupled with Pattern Recognition Chemometrics

ECS Meeting Abstracts ◽

10.1149/ma2009-02/22/1970 ◽

2009 ◽

Keyword(s):

Pattern Recognition ◽

Fault Detection ◽

Electrochemical Sensor ◽

Fault Detection And Diagnosis ◽

Detection And Diagnosis ◽

Early Fault Detection

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Early fault detection and diagnosis in bearings based on logarithmic energy entropy and statistical pattern recognition

10.3390/ecea-2-e001 ◽

2015 ◽

Author(s):

Dragoljub Gajic ◽

Aleksandar Brkovic ◽

Jovan Gligorijevic ◽

Ivana Savic-Gajic ◽

Olga Georgieva ◽

...

Keyword(s):

Pattern Recognition ◽

Fault Detection ◽

Fault Detection And Diagnosis ◽

Statistical Pattern Recognition ◽

Energy Entropy ◽

Statistical Pattern ◽

Detection And Diagnosis ◽

Early Fault Detection ◽

Logarithmic Energy

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Multivariate Statistical Process Control of Copper ECD by Early Fault Detection and Diagnosis Using In Situ DC/AC Electrochemical Sensor Coupled with D- and Q-Statistic

ECS Meeting Abstracts ◽

10.1149/ma2011-02/28/1934 ◽

2011 ◽

Keyword(s):

Electrochemical Sensor ◽

Statistical Process Control ◽

Fault Detection And Diagnosis ◽

Multivariate Statistical Process Control ◽

Multivariate Statistical ◽

Statistical Process ◽

Detection And Diagnosis ◽

Early Fault Detection ◽

Q Statistic

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Early fault detection and diagnosis in Finnish nuclear power plants

Progress in Nuclear Energy ◽

10.1016/0149-1970(88)90067-4 ◽

1988 ◽

Vol 21 ◽

pp. 479-487

Author(s):

J. Eklund ◽

S. Kuismanen ◽

A. Lucander ◽

L.-E. Häll

Keyword(s):

Fault Detection ◽

Nuclear Power ◽

Power Plants ◽

Nuclear Power Plants ◽

Fault Detection And Diagnosis ◽

Detection And Diagnosis ◽

Early Fault Detection

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Induction motor fault detection and diagnosis using a current state space pattern recognition

Pattern Recognition Letters ◽

10.1016/j.patrec.2010.09.010 ◽

2011 ◽

Vol 32 (2) ◽

pp. 321-328 ◽

Cited By ~ 13

Author(s):

João F. Martins ◽

Vitor F. Pires ◽

Tito Amaral

Keyword(s):

Pattern Recognition ◽

Fault Detection ◽

State Space ◽

Induction Motor ◽

Fault Detection And Diagnosis ◽

Current State ◽

Space Pattern ◽

Detection And Diagnosis ◽

A Current

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Novel pattern recognition-enhanced sensor fault detection and diagnosis for chiller plant

Energy and Buildings ◽

10.1016/j.enbuild.2020.110443 ◽

2020 ◽

Vol 228 ◽

pp. 110443

Author(s):

X.J. Luo ◽

K.F. Fong

Keyword(s):

Pattern Recognition ◽

Fault Detection ◽

Fault Detection And Diagnosis ◽

Sensor Fault ◽

Sensor Fault Detection ◽

Detection And Diagnosis

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Early fault detection and diagnosis for nuclear power plants / Frühzeitige Fehlerfindung und Fehlerdiagnose in Kernkraftwerken.

Kerntechnik ◽

10.1515/kern-1987-500209 ◽

1987 ◽

Vol 50 (2) ◽

pp. 90-95

Author(s):

Ø. Berg ◽

R.-E. Grini ◽

M. Yokobayashi

Keyword(s):

Fault Detection ◽

Nuclear Power ◽

Power Plants ◽

Nuclear Power Plants ◽

Fault Detection And Diagnosis ◽

Detection And Diagnosis ◽

Early Fault Detection

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In-situ Electrochemical Sensor for Early Fault Detection in Copper Damascene Plating Process

ECS Meeting Abstracts ◽

10.1149/ma2005-01/7/332 ◽

2005 ◽

Keyword(s):

Fault Detection ◽

Electrochemical Sensor ◽

Early Fault Detection

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On-line early fault detection and diagnosis of municipal solid waste incinerators

Waste Management ◽

10.1016/j.wasman.2007.11.014 ◽

2008 ◽

Vol 28 (11) ◽

pp. 2406-2414 ◽

Cited By ~ 6

Author(s):

Jinsong Zhao ◽

Jianchao Huang ◽

Wei Sun

Keyword(s):

Fault Detection ◽

Municipal Solid Waste ◽

Solid Waste ◽

Fault Detection And Diagnosis ◽

On Line ◽

Waste Incinerators ◽

Detection And Diagnosis ◽

Early Fault Detection

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Fault Detection and Diagnosis in an Induction Machine Drive: A Pattern Recognition Approach Based on Concordia Stator Mean Current Vector

IEEE Transactions on Energy Conversion ◽

10.1109/tec.2005.847961 ◽

2005 ◽

Vol 20 (3) ◽

pp. 512-519 ◽

Cited By ~ 138

Author(s):

D. Diallo ◽

M.E.H. Benbouzid ◽

D. Hamad ◽

X. Pierre

Keyword(s):

Pattern Recognition ◽

Fault Detection ◽

Induction Machine ◽

Fault Detection And Diagnosis ◽

Current Vector ◽

Machine Drive ◽

Pattern Recognition Approach ◽

Detection And Diagnosis ◽

Mean Current ◽

Induction Machine Drive

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