Two-dimensional Chemical Delineation of Junction Profile with High Spatial Resolution and Application in Failure Analysis in 65nm Technology Node
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2005 ◽
Vol 76
(4)
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pp. 043302
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2000 ◽
Vol 2000.4
(0)
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pp. 151-152
2013 ◽
Vol 760-762
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pp. 1524-1528
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2006 ◽
Vol 41
(7)
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pp. 545-552
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2014 ◽
Vol 372
(2010)
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pp. 20130034
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