Calibration of the Enthalpy-Porosity Based Method for CZ Silicon Growth

2019 ◽  
Vol 18 (1) ◽  
pp. 989-994 ◽  
Author(s):  
Bing Dai ◽  
Balaji Devulapalli ◽  
Prashant Gunjalb ◽  
Milind Kulkarni
Keyword(s):  
Silicon Growth

Selective silicon growth on nitride for silicon-plugging process in LPCVD

2003 ◽  
Vol 254 (3-4) ◽  
pp. 329-335 ◽  
Author(s):  
Woo-Seok Cheong ◽  
Seok-Kiu Lee ◽  
Jae-Sung Roh
Keyword(s):  
Silicon Growth

Reactive‐ion‐beam‐sputtered WNxfilms on silicon: Growth mode and electrical properties

1994 ◽  
Vol 75 (8) ◽  
pp. 3900-3907 ◽  
Author(s):  
M. Eizenberg ◽  
F. Meyer ◽  
A. Benhocine ◽  
D. Bouchier
Keyword(s):  
Electrical Properties ◽  
Ion Beam ◽  
Growth Mode ◽  
Silicon Growth

Low Coherence Interferometry for Non-Invasive Semiconductor Monitoring

1993 ◽  
Vol 324 ◽  
Author(s):  
Chris M. Lawson ◽  
Robert R. Michael
Keyword(s):  
Solar Cell ◽  
Manufacturing Processes ◽  
Growth Monitoring ◽  
Low Coherence ◽  
Non Invasive ◽  
Low Coherence Interferometry ◽  
Silicon Growth ◽  
Silicon Thickness ◽  
Efficient Solar Cell ◽  
Optical Low Coherence Reflectometry

AbstractWe report on the first use of optical low coherence reflectometry (OLCR) for Edge Defined Film-Fed Growth (EFG) silicon characterization. This OLCR sensor system has been used to measure horizontal profiles of silicon thickness and flatness to an accuracy of 1.5 Rim with the sensor head positioned 1 cm away from the silicon. The use of this noninvasive sensor for EFG silicon growth monitoring may lead to more efficient solar cell manufacturing processes.

scholarly journals Epitaxial silicon growth for solar cells. Final report

1979 ◽  
Author(s):  
R V D'Aiello ◽  
P H Robinson ◽  
D Richman
Keyword(s):  
Solar Cells ◽  
Final Report ◽  
Epitaxial Silicon ◽  
Silicon Growth

Selective Polycrystalline Silicon Growth and Its Applications to Trench Isolation

1993 ◽  
Vol 140 (4) ◽  
pp. 1110-1117
Author(s):  
M. E. Grupen‐Shemansky ◽  
H. M. Liaw ◽  
B. Vasquez ◽  
S. L. Sundaram
Keyword(s):  
Polycrystalline Silicon ◽  
Trench Isolation ◽  
Silicon Growth

scholarly journals Vapour growth of silicon: growth anisotropy and adsorption

1991 ◽  
Vol 115 (1-4) ◽  
pp. 542-550 ◽  
Author(s):  
J.G.E. Gardeniers ◽  
L.J. Giling
Keyword(s):  
Growth Anisotropy ◽  
Silicon Growth
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