Dissolution Inhibition in Cu-CMP Using Dodecyl-Benzene-Sulfonic Acid Surfactant with Oxalic Acid and Glycine as Complexing Agents
2008 ◽
Vol 155
(12)
◽
pp. H971
◽
Keyword(s):
1998 ◽
Vol 5
(4)
◽
pp. 199-204
◽
2015 ◽
Vol 26
(11)
◽
pp. 8497-8506
◽
Keyword(s):
1984 ◽
Vol 67
(6)
◽
pp. 1327-1330
◽
2016 ◽
Vol 307
◽
pp. 382-391
◽
2021 ◽
Vol 1204
(1)
◽
pp. 012004
2015 ◽
Vol 7
(3)
◽
pp. 518-525
◽
Keyword(s):