Metal Surface Characterization for Understanding of Electrical Properties on Aluminum Interconnects

2019 ◽  
Vol 13 (2) ◽  
pp. 307-319 ◽  
Author(s):  
Atsushi Otake ◽  
Tomoko Aoki
2015 ◽  
Vol 476 (1) ◽  
pp. 12-16 ◽  
Author(s):  
O. G. Maksimova ◽  
O. S. Baruzdina ◽  
A. V. Maksimov

1992 ◽  
Vol 260 ◽  
Author(s):  
Jen-Ren Wang ◽  
Jian-Yang Lin ◽  
Huey-Liang Hwang

ABSTRACTIn order to simulate the precipitation effect during the aluminum metallization in the VLSI processing, an analytical model was constructed in this work. The nucleation behaviors of the silicon and copper precipitates within the aluminum - 1.0 weight percent silicon - 0.5 weight percent copper were studied. The volume free energies and interfacial energies were estimated, and the activation energy barriers for the precipitate formation were calculated. Silicon precipitate is more likely to nucleate than copper precipitate due to its lower interfacial energy and strain energy. The mechanical and electrical properties of the aluminum interconnects can be improved by the precipitate hardening.


2016 ◽  
Vol 1819 ◽  
Author(s):  
A. Olarte-Paredes ◽  
R. Salgado-Delgado ◽  
A. M. Salgado-Delgado ◽  
E. Rubio-Rosas ◽  
E. García-Hernández ◽  
...  

ABSTRACTIn recent decades conducting polymers have attracted attention due to their promising and versatile applications in different fields. There is a considerable interest in the application of nanotubes multilayer carbon (MWCNT) because of their unique structure, high electrical conductivity, high chemical stability, and high surface-to-volume ratio. These properties make MWCNT extremely attractive for fabricating sensors. Composites based on a matrix of a biopolymer such as the chitosan (CS) with a lot of conductive polymers or (MWCNT), have received increasing attention due to their attractive structural, mechanical and electrical properties that could have applications in different fields such as tissue engineering, biomedicine, and manufacture of sensors and biosensors. Have been reported conducting polymer composites with an extensive range of interesting mechanical and electrical properties, which is reported in this paper to obtain films by ultrasonic bath mixing of Chitosan 3% w/v using polypyrrole (PPy) and multilayer carbon nanotubes. Surface characterization was performed using scanning electron microscopy (SEM). The electrical properties were analyzed using electrochemical impedance spectroscopy (EIS) in a frequency range 0.01 - 10E+5 Hz to 10 mV AC. The results show that the films of CS/PPy/MWCNT have a homogeneous distribution where the chitosan envelops the loads, while for EIS retention load was observed within the matrix observing these materials in accordance with the equivalent circuit of Warburg showing diffusional process.


Nanomaterials ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 1829
Author(s):  
Manuel Müller ◽  
Rukan Nasri ◽  
Lars Tiemann ◽  
Irene Fernandez-Cuesta

We present here a novel resist formulation with active thiol groups at the surface. The material is UV curable, and can be patterned at the micro- and nanoscale by UV nanoimprint lithography. The resist formulation development, its processing, patterning and surface characterization are presented here. In addition, a possible application, including its use to modify the electrical properties of graphene devices is shown. The cured material is highly transparent, intrinsically hydrophilic and can be made more hydrophilic following a UV-ozone or an O2 plasma activation. We evaluated the hydrophilicity of the polymer for different polymer formulations and curing conditions. In addition, a protocol for patterning of the polymer in the micro and nanoscale by nanoimprinting is given and preliminary etching rates together with the polymer selectivity are measured. The main characteristic and unique advantage of the polymer is that it has thiol functional groups at the surface and in the bulk after curing. These groups allow for direct surface modifications with thiol-based chemistry e.g., thiol-ene reactions. We prove the presence of the thiol groups by Raman spectroscopy and perform a thiol-ene reaction to show the potential of the easy “click chemistry”. This opens the way for very straightforward surface chemistry on nanoimprinted polymer samples. Furthermore, we show how the polymer improves the electrical properties of a graphene field effect transistor, allowing for optimal performance at ambient conditions.


1997 ◽  
Vol 487 ◽  
Author(s):  
L. Fornaro ◽  
H. Chen ◽  
K. Chattopadhyay ◽  
K.-T Chen ◽  
A. Burger

AbstractThe optical, electrical and surface properties of mercuric iodide platelets grown from solution in a HgI2-HI-H2O system were investigated by comparing them with Physical Vapor Transport (PVT) grown crystals. The absence of bulk imperfections and the uniformity of the as-grown surfaces and the KI solution etched surfaces were confirmed by optical microscopy. The as-grown surface uniformity is higher for solution grown crystals than that of PVT crystals, since the platelets do not have to be cleaved or polished. AFM studies show that the roughness for the cleaved, aged and etched surfaces were 0.06 nm, 0.48 nm and 0.3 nm respectively. Low temperature photoluminescence properties were measured for the two kind of crystals and will be discussed. However, I-V curves give higher current density and lower apparent resistivity values for the solution grown than for PVT grown crystals. Correlations between optical and surface quality as well as the electrical properties of the crystals grown from both solution and PVT methods are also discussed.


e-Polymers ◽  
2015 ◽  
Vol 15 (4) ◽  
pp. 255-261
Author(s):  
Atif Islam ◽  
Tariq Yasin ◽  
Aneela Sabir ◽  
Shahzad Maqsood Khan ◽  
Misbah Sultan ◽  
...  

AbstractChitosan and poly(vinyl alcohol) were blended and cross-linked with tetraethoxysilane and showed conductive properties. Impedance spectroscopy was used to study the influence of temperature on the electrical properties of the membranes. The conductivity of the membranes was increased with an increase in temperature. Free water was decreased and bound water was increased with an increase in cross-linker contents. The tensile strength improved, whereas elongation at break decreased by increasing the amount of cross-linker contents. The water contact angle of the membranes lowered with time, exhibiting the hydrophilic nature of the membranes. The novel characteristics of biocompatible membranes can be used in biomedical applications including biological schemes that require smaller charge in medicinal apparatus, bioelectrode coatings, etc.


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