Effects of the Secondary Electron Emision Coefficent on the Generation of Charged Particles in RF Oxygen Discharge
1974 ◽
Vol 13
(6)
◽
pp. 944-949
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Keyword(s):
1985 ◽
Vol 237
(3)
◽
pp. 543-546
◽
Keyword(s):
1984 ◽
Vol 75
◽
pp. 203-209
Keyword(s):
1983 ◽
Vol 41
◽
pp. 708-709
1977 ◽
Vol 35
◽
pp. 2-5
1970 ◽
Vol 28
◽
pp. 114-115
1978 ◽
Vol 36
(1)
◽
pp. 524-525