Investigation of Copper Processing in the Damascene Process by Electrochemical Impedance Analysis.
2016 ◽
Vol 86
◽
pp. 770-776
◽
Keyword(s):
Keyword(s):
1987 ◽
Vol 134
(12)
◽
pp. 3078-3083
◽
1993 ◽
Vol 345
(1-2)
◽
pp. 487
Keyword(s):