Angle-Resolved Photoelectron Spectroscopy Study on Ultrathin Gate Dielectrics

Hiroshi Nohira; Takeo Hattori

doi:10.1149/1.2778376

Angle-Resolved Photoelectron Spectroscopy Study on Ultrathin Gate Dielectrics

ECS Transactions ◽

10.1149/1.2778376 ◽

2019 ◽

Vol 11 (6) ◽

pp. 183-194

Author(s):

Hiroshi Nohira ◽

Takeo Hattori

Keyword(s):

Photoelectron Spectroscopy ◽

Gate Dielectrics ◽

Spectroscopy Study

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Angle-resolved Photoelectron Spectroscopy Study on Atomic-scale Depth Profile of Composition and Chemical Structure of Gate Dielectrics

ECS Meeting Abstracts ◽

10.1149/ma2005-01/9/396 ◽

2005 ◽

Keyword(s):

Depth Profile ◽

Photoelectron Spectroscopy ◽

Chemical Structure ◽

Gate Dielectrics ◽

Atomic Scale ◽

Spectroscopy Study

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Angle-Resolved Photoelectron Spectroscopy Study on Ultrathin Gate Dielectrics

ECS Meeting Abstracts ◽

10.1149/ma2007-02/25/1287 ◽

2007 ◽

Keyword(s):

Photoelectron Spectroscopy ◽

Gate Dielectrics ◽

Spectroscopy Study

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X-Ray Photoelectron Spectroscopy Study of Si-C Film Growth by Chemical Vapor Deposition of Ethylene on Si(100)

10.21236/ada197437 ◽

1988 ◽

Author(s):

P. A. Taylor ◽

M. Bozack ◽

W. J. Choyke ◽

J. T. Yates ◽

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Photoelectron Spectroscopy ◽

Film Growth ◽

Chemical Vapor ◽

Spectroscopy Study ◽

X Ray

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Time‐of‐flight secondary ion mass spectrometry and X‐ray photoelectron spectroscopy study of 2‐phenylimidazole on brass

Rapid Communications in Mass Spectrometry ◽

10.1002/rcm.8974 ◽

2020 ◽

Vol 35 (2) ◽

Author(s):

Matjaž Finšgar

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Spectroscopy Study ◽

X Ray ◽

Ion Mass Spectrometry ◽

Secondary Ion

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A high-resolution X-ray photoelectron spectroscopy study of trifluoroacetic anhydride labelling of hydroxyl groups: demonstration of the β shift due to OC(O)CF3

Polymer ◽

10.1016/0032-3861(93)90418-a ◽

1993 ◽

Vol 34 (9) ◽

pp. 1795-1799 ◽

Cited By ~ 35

Author(s):

A.P. Ameen ◽

R.J. Ward ◽

R.D. Short ◽

G. Beamson ◽

D. Briggs

Keyword(s):

High Resolution ◽

Photoelectron Spectroscopy ◽

Trifluoroacetic Anhydride ◽

Hydroxyl Groups ◽

Spectroscopy Study ◽

X Ray

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Unveiling the coexistence of cis- and trans-isomers in the hydrolysis of ZrO2: A coupled DFT and high-resolution photoelectron spectroscopy study

The Journal of Chemical Physics ◽

10.1063/5.0037636 ◽

2020 ◽

Vol 153 (24) ◽

pp. 244308

Author(s):

Ali Abou Taka ◽

Mark C. Babin ◽

Xianghai Sheng ◽

Jessalyn A. DeVine ◽

Daniel M. Neumark ◽

...

Keyword(s):

High Resolution ◽

Photoelectron Spectroscopy ◽

Spectroscopy Study ◽

Trans Isomers ◽

Cis And Trans Isomers ◽

Cis And Trans ◽

Hydrolysis Of

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An X-ray photoelectron spectroscopy study of the surface layers between diamond crystallites and silicon substrate deposited by microwave-plasma-assisted chemical vapour deposition

Diamond and Related Materials ◽

10.1016/0925-9635(93)90120-q ◽

1993 ◽

Vol 2 (2-4) ◽

pp. 558-561 ◽

Cited By ~ 5

Author(s):

S. Haq ◽

C. Somerton ◽

D. Tunnicliffe ◽

J.A. Savage ◽

P. John ◽

...

Keyword(s):

Chemical Vapour Deposition ◽

Silicon Substrate ◽

Photoelectron Spectroscopy ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Spectroscopy Study ◽

Surface Layers ◽

X Ray

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Combined Time-of-Flight Secondary Ion Mass Spectrometry and X-ray Photoelectron Spectroscopy Study of the Surface Segregation of Poly(methyl methacrylate) (PMMA) in Bisphenol A Polycarbonate/PMMA Blends

Macromolecules ◽

10.1021/ma00117a038 ◽

1995 ◽

Vol 28 (13) ◽

pp. 4631-4637 ◽

Cited By ~ 52

Author(s):

J.-B. Lhoest ◽

P. Bertrand ◽

L. T. Weng ◽

J.-L. Dewez

Keyword(s):

Mass Spectrometry ◽

Bisphenol A ◽

Photoelectron Spectroscopy ◽

Surface Segregation ◽

Secondary Ion Mass Spectrometry ◽

Spectroscopy Study ◽

Bisphenol A Polycarbonate ◽

X Ray ◽

Secondary Ion ◽

Pmma Blends

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X-ray photoelectron spectroscopy study of thiols adsorbed on Pt(111) with and without the presence of a copper monolayer

Surface and Interface Analysis ◽

10.1002/1096-9918(200008)30:1<359::aid-sia819>3.0.co;2-j ◽

2000 ◽

Vol 30 (1) ◽

pp. 359-363 ◽

Cited By ~ 5

Author(s):

C. Alonso ◽

M. F. L�pez ◽

A. Guti�rrez ◽

M. L. Escudero

Keyword(s):

Photoelectron Spectroscopy ◽

Spectroscopy Study ◽

X Ray

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Nitrosyl Isocyanate (ONNCO): Gas-Phase Generation and a HeI Photoelectron Spectroscopy Study

Inorganic Chemistry ◽

10.1021/ic051349w ◽

2005 ◽

Vol 44 (25) ◽

pp. 9283-9287 ◽

Cited By ~ 25

Author(s):

Xiaoqing Zeng ◽

Maofa Ge ◽

Zheng Sun ◽

Dianxun Wang

Keyword(s):

Gas Phase ◽

Photoelectron Spectroscopy ◽

Spectroscopy Study

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