Atomic-Scale Analyses of Non-Equilibrium Surface Reactions During Plasma Processing
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2002 ◽
Vol 204
(1-2)
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pp. 379-384
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2017 ◽
Vol 147
(8)
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pp. 084902
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2013 ◽
Vol 232
(1)
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pp. 468-481
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2005 ◽
Vol 267
(1-3)
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pp. 139-152
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2004 ◽
Vol 44
(56)
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pp. 478-484
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