Implantation and Detection of Low Energy Argon Ions in Silicon Single Crystals
1968 ◽
Vol 115
(9)
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pp. 974
◽
Keyword(s):
2017 ◽
Vol 496
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pp. 18-23
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2020 ◽
Vol 124
(45)
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pp. 24795-24808
1991 ◽
Vol 176
(1-3)
◽
pp. 35-37
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Keyword(s):
2011 ◽
Vol 131
(10)
◽
pp. 2093-2099
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1993 ◽
Vol 8
(10)
◽
pp. 2627-2633
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