Small-Batch Reactor Development for Silicon Epitaxial Film Growth Based on Theory of Transport Phenomena

2019 ◽  
Vol 2 (7) ◽  
pp. 21-32 ◽  
Author(s):  
Hitoshi Habuka ◽  
Hisashi Sakakibara ◽  
Masayuki Kawaoka ◽  
Kenichi Arimura ◽  
Lance Scudder ◽  
...  
Keyword(s):  
Epitaxial Film ◽  
Film Growth ◽  
Batch Reactor ◽  
Transport Phenomena ◽  
Epitaxial Film Growth

scholarly journals Large-scale molecular dynamics simulations of TiN/TiN(001) epitaxial film growth

2016 ◽  
Vol 34 (4) ◽  
pp. 041509 ◽  
Author(s):  
Daniel Edström ◽  
Davide G. Sangiovanni ◽  
Lars Hultman ◽  
Ivan Petrov ◽  
J. E. Greene ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Large Scale ◽  
Epitaxial Film ◽  
Film Growth ◽  
Dynamics Simulations ◽  
Epitaxial Film Growth

scholarly journals Solid-phase epitaxial film growth and optical properties of a ferroelectric oxide, Sr2Nb2O7

2017 ◽  
Vol 122 (13) ◽  
pp. 135305 ◽  
Author(s):  
Yukio Nezu ◽  
Yu-Qiao Zhang ◽  
Chunlin Chen ◽  
Yuichi Ikuhara ◽  
Hiromichi Ohta
Keyword(s):  
Optical Properties ◽  
Epitaxial Film ◽  
Film Growth ◽  
Solid Phase ◽  
Epitaxial Film Growth ◽  
Ferroelectric Oxide

Optimizing GaSb and GaSb(001) surfaces for epitaxial film growth

1999 ◽  
Vol 343-344 ◽  
pp. 500-503 ◽  
Author(s):  
J.S. Solomon ◽  
L. Petry ◽  
D.H. Tomich
Keyword(s):  
Epitaxial Film ◽  
Film Growth ◽  
Epitaxial Film Growth

High-Quality Epitaxial Film Growth of Superconducting Sodium-Cobalt Oxyhydrate, Na0.3 CoO2 · 1.3H2 O

2011 ◽  
pp. 303-309
Author(s):  
Kenji Sugiura ◽  
Hiromichi Ohta ◽  
Kenji Nomura ◽  
Hiroshi Yanagi ◽  
Masahiro Hirano ◽  
...  
Keyword(s):  
Epitaxial Film ◽  
Film Growth ◽  
High Quality ◽  
Epitaxial Film Growth

Epitaxial Film Growth and Characterization

2000 ◽  
pp. 1-53 ◽  
Author(s):  
I FERGUSON ◽  
A THOMPSON ◽  
S BARNETT ◽  
F LONG ◽  
Z CHUANFENG
Keyword(s):  
Epitaxial Film ◽  
Film Growth ◽  
Epitaxial Film Growth

AlN Epitaxial Film Growth Using MOCVD For a GHz-band FBAR

2009 ◽  
Vol 55 (3(1)) ◽  
pp. 1132-1135 ◽  
Author(s):  
Chung-Mo Yang ◽  
Seong-Kweon Kim
Keyword(s):  
Epitaxial Film ◽  
Film Growth ◽  
Epitaxial Film Growth
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