Influence of Silicon Slice Curvature on Thermally Induced Stresses
1971 ◽
Vol 118
(1)
◽
pp. 143
◽
1972 ◽
Vol 30
◽
pp. 524-525
1991 ◽
Vol 113
(3)
◽
pp. 258-262
◽
Keyword(s):
1987 ◽
Vol 21
(5)
◽
pp. 454-480
◽
1989 ◽
Vol 29
(2)
◽
pp. 100-106
◽
1993 ◽
Vol 21
(4)
◽
pp. 337-348
◽