Concentration, Solubility, and Equilibrium Distribution Coefficient of Nitrogen and Oxygen in Semiconductor Silicon

1973 ◽  
Vol 120 (7) ◽  
pp. 975 ◽  
Author(s):  
Y. Yatsurugi ◽  
N. Akiyama ◽  
Y. Endo ◽  
T. Nozaki
Keyword(s):  
Distribution Coefficient ◽  
Equilibrium Distribution ◽  
Equilibrium Distribution Coefficient ◽  
Semiconductor Silicon

Impurity Solubility and Redistribution Due to Recrystallization of Preamorphized Silicon

2006 ◽  
Vol 912 ◽  
Author(s):  
Ray Duffy ◽  
Vincent Venezia ◽  
Marco Hopstaken ◽  
Geert Maas ◽  
Thuy Dao ◽  
...  
Keyword(s):  
Distribution Coefficient ◽  
Silicon Substrate ◽  
Laser Annealing ◽  
Equilibrium Distribution ◽  
Crystalline Silicon ◽  
Solid Phase ◽  
Amorphous Region ◽  
Equilibrium Distribution Coefficient ◽  
Impurity Atoms ◽  
Preferential Diffusion

AbstractThe use of silicon substrate preamorphization in ultrashallow junction formation has increased in recent years. The reduction of channeling during impurity implantation, coupled with higher-than-equilibrium metastable solubility levels, produces scaled junctions with low resistances. However, a number of physical phenomena arise that must be considered for proper impurity profile and device optimization.With respect to impurity solubility advanced annealing techniques such as solid-phase-epitaxial-regrowth (SPER), flash, and laser annealing, can place impurity atoms on substitutional sites in the silicon lattice to extremely high concentrations when combined with preamorphization. In this context there is a relationship between the equilibrium distribution coefficient and metastable solubility. The long-established equilibrium distribution coefficient of an impurity, extracted in the liquid to solid phase transformation, can make a prediction of metastable solubility after transformation of amorphous silicon into crystalline silicon during SPER, flash, and laser annealing.With respect to impurity redistribution the significant effects can be split into 3 categories, namely before, during, and after recrystallization. Before recrystallization impurity diffusion in the amorphous region may occur. Boron is particularly susceptible to this effect, which is very significant for the formation of p-type junctions. During recrystallization many impurities move ahead of the amorphous-crystalline (a/c) interface and relocate closer to the surface. In general redistribution is more likely at high impurity concentrations. For low-temperature SPER there is a direct correlation between the magnitude of this redistribution effect and the impurity metastable solubility. After recrystallization, with SPER, flash, and laser annealing commonly leaving residual damage in the silicon substrate, interstitial-diffusers are especially vulnerable to preferential diffusion toward the surface, where impurity atoms may be trapped, ultimately leading to a more shallow profile.

Isotope Effect at the Transition Point Studied by Zone Refining of Solid Lithium Sulfate

1965 ◽  
Vol 20 (10) ◽  
pp. 1279-1282
Author(s):  
Arnold Lundén ◽  
Erik Svantesson ◽  
Henry Svensson
Keyword(s):  
Distribution Coefficient ◽  
Isotope Effect ◽  
Transition Point ◽  
Equilibrium Distribution ◽  
Lithium Isotope ◽  
Lithium Sulfate ◽  
Zone Refining ◽  
Equilibrium Distribution Coefficient

The technique of zone refining has been applied at the transition point between α- and β-Li2SO4. The light lithium isotope is enriched in the direction of zone travel. The equilibrium distribution coefficient, k0, is 0.996 for the two isotopic lithium sulfates. It is estimated that the transition point of 6Li2SO4 is about 0.7°C lower than that of 7Li2SO4.

scholarly journals Cadmium distribution coefficeints and Cd transport in structured soils

2011 ◽  
Vol 48 (No. 3) ◽  
pp. 96-100 ◽  
Author(s):  
Ľ. Lichner ◽  
A. Čipáková
Keyword(s):  
Distribution Coefficient ◽  
Distribution Coefficients ◽  
Equilibrium Distribution Coefficient ◽  
Loamy Sand Soil ◽  
Structured Soils ◽  
Cadmium Transport ◽  
Batch Technique ◽  
The Matrix ◽  
Loam Soil ◽  
Cd Transport

In the case of cadmium transport via soil macropores, the short-term duration of an interaction between the reactive solute in aqueous phase and soil, as well as cadmium precipitation or adsorption on particles < 10–5 m should be taken into account. Two distribution coefficients are proposed for predicting the cadmium transport in a structured soil: the matrix distribution coefficient Kdm, equal to the equilibrium distribution coefficient Kdeq and estimated using the conventional batch technique, and the macropore distribution coefficient KdM, estimated using the modified batch technique. It was found that the conventional approach (using the coefficient Kdeq only) would underestimate a penetration of the part of Cd transported in the macropores about 255-times in the loamy-sand soil in Kalinkovo, 20-times in the loam soil in Macov, and 122-times in the clay soil in Jurová in comparison with the approach proposed in this study.

Pyroxene and biotite from the charnockitic rocks of Garbham area, Srikakulam district, Andhra Pradesh, India

1970 ◽  
Vol 37 (290) ◽  
pp. 682-692 ◽  
Author(s):  
C. Bhattacharyya
Keyword(s):  
Optical Properties ◽  
Distribution Coefficient ◽  
Andhra Pradesh ◽  
Equilibrium Distribution ◽  
Chemical Analyses ◽  
The World

SummaryChemical analyses and optical properties of ten orthopyroxenes, two clinopyroxenes, and six biotites (partial analyses) are presented from basic to intermediate charnockites of the Garbham area. The orthopyroxene is hypersthene to ferrohypersthene and the clinopyroxene is sahlite. Biotite has secondarily formed from pyroxene, particularly orthopyroxene, as a result of injection of potassic fluid in the basic charnockite. By combining the data of Srikakulam with those from other areas of the world it is shown that during the transformation of pyroxene to biotite in charnockitic rocks, in general, Mg and Fe 2+ attain near-equilibrium distribution between orthopyroxene and biotite as well as between clinopyroxene and biotite. The magnesium distribution coefficient (KD) of coexisting orthopyroxene and biotite is found to increase with the increase of temperature of biotite formation. A tentative geothermometric scale has been proposed plotting temperature of biotite formation against magnesium distribution coefficient of coexisting orthopyroxene and biotite. According to this scale, biotite in basic and semibasic charnockites from Garbham has formed between 285 and 465 °C.

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