Vapor-Phase Deposition of Beta-Silicon Carbide on Silicon Substrates
1973 ◽
Vol 120
(1)
◽
pp. 138
◽
1997 ◽
Vol 32
(9)
◽
pp. 431-438
◽
2003 ◽
Vol 34
(1)
◽
pp. 1419
◽
Keyword(s):
1961 ◽
Vol 53
(6)
◽
pp. 48A-51A
◽
Keyword(s):
2011 ◽
Vol 20
(8)
◽
pp. 1246-1249
◽