Atomic Layer Deposition of Ru Thin Films Using 2,4-(Dimethylpentadienyl)(ethylcyclopentadienyl)Ru by a Liquid Injection System

2007 ◽  
Vol 154 (2) ◽  
pp. D95 ◽  
Author(s):  
Seong Keun Kim ◽  
Sang Young Lee ◽  
Sang Woon Lee ◽  
Gyu Weon Hwang ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Injection System ◽  
Layer Deposition ◽  
Liquid Injection

Growth of Noble Metal Ru Thin Films by Liquid Injection Atomic Layer Deposition

2009 ◽  
Vol 113 (26) ◽  
pp. 11329-11335 ◽  
Author(s):  
Seong Keun Kim ◽  
Susanne Hoffmann-Eifert ◽  
Rainer Waser
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Noble Metal ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Liquid Injection

Growth of RuO2 thin films by liquid injection atomic layer deposition

2010 ◽  
Vol 518 (16) ◽  
pp. 4701-4704 ◽  
Author(s):  
K. Hušeková ◽  
E. Dobročka ◽  
A. Rosová ◽  
J. Šoltýs ◽  
A. Šatka ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Liquid Injection

Atomic Layer Deposition of LaOx and LaAlOx Thin Films Using Direct Liquid Injection of Lanthanum Sources

2019 ◽  
Vol 33 (2) ◽  
pp. 411-416
Author(s):  
Yoshi Senzaki ◽  
Yoshi Okuyama ◽  
Gi Kim ◽  
Jerry Mack ◽  
Larry Matthysse ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Liquid Injection ◽  
Direct Liquid Injection

Atomic Layer Deposition (ALD) of Bismuth Titanium Oxide Thin Films Using Direct Liquid Injection (DLI) Method

2003 ◽  
Vol 59 (1) ◽  
pp. 1483-1489 ◽  
Author(s):  
Young Jin Cho ◽  
Yo-Sep Min ◽  
Jung-Hyun Lee ◽  
Bum-Seok Seo ◽  
June Key Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Titanium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Liquid Injection ◽  
Direct Liquid Injection
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