Low Drive-Voltage and High-Bandwidth Electro-Optic Modulators Based on BaTiO3 Thin-Film Waveguides

2019 ◽  
Vol 3 (11) ◽  
pp. 125-134 ◽  
Author(s):  
De-Gui Sun ◽  
Xiuhua Fu ◽  
Zhifu Liu ◽  
Seng-Tiong Ho ◽  
Bruce Wessels
Keyword(s):  
Thin Film ◽  
Drive Voltage ◽  
Electro Optic ◽  
High Bandwidth ◽  
Batio3 Thin Film ◽  
Thin Film Waveguides

High-speed travelling-wave BaTiO3 thin-film electro-optic modulators

2005 ◽  
Vol 41 (23) ◽  
pp. 1296 ◽  
Author(s):  
P. Tang ◽  
A.L. Meier ◽  
D.J. Towner ◽  
B.W. Wessels
Keyword(s):  
Thin Film ◽  
High Speed ◽  
Travelling Wave ◽  
Electro Optic ◽  
Batio3 Thin Film

Design and Fabrication of BaTiO3 Crystal Thin-Film Waveguides

2014 ◽  
Vol 609-610 ◽  
pp. 201-207
Author(s):  
Jing Zhang ◽  
Xiu Hua Fu ◽  
Li Jun Guo ◽  
Jian Hong Zhou ◽  
Dong Mei Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Gas Flow ◽  
Single Mode ◽  
Main Process ◽  
X Ray Diffraction ◽  
Crystal Film ◽  
Electro Optic ◽  
Ridge Waveguides ◽  
Thin Film Waveguides ◽  
Mgo Substrate

BaTiO3 crystal film has the very high electro-optic effect, so it has important research value for thin film waveguide electro-optic modulators. In this work, BPM software is used to simulate the single-mode condition of ridge waveguide at first, then BaTiO3 film waveguide structure is designed with suitable film thickness.BaTiO3 waveguide thin films are grown by pulsed laser deposition on single crystal MgO substrate. The BaTiO3 thin-film crystalline structures grown at different temperature sand different laser powers were analyzed by using X ray diffraction , which showed the BaTiO3 films have a priority crystallization direction and good crystallization quality at 750°C grown temperature. For the optimally-designed waveguide structures, the PECVD technique and ICP plasma etching method are employed to coat and etch Si3N4 films, respectively. Through the optimization of main process parameters, 60 sccm reaction gas flow and 150 nm/min etching speed are finally selected to create the ridge waveguides, and consequently, the surface roughness of Si3N4 film waveguide reaches 2.3 nm.

Systematic development of high bandwidth, low drive voltage organic electro-optic devices and their applications

2003 ◽  
Vol 21 (1-3) ◽  
pp. 19-28 ◽  
Author(s):  
Larry R. Dalton ◽  
Bruce H. Robinson ◽  
Alex K.Y. Jen ◽  
W.H. Steier ◽  
R. Nielsen
Keyword(s):  
Drive Voltage ◽  
Electro Optic ◽  
High Bandwidth ◽  
Systematic Development

Optical phenomena in thin-film waveguides

1974 ◽  
Vol 112 (2) ◽  
pp. 231 ◽  
Author(s):  
E.M. Zolotov ◽  
V.A. Kiselev ◽  
V.A. Sychugov
Keyword(s):  
Thin Film ◽  
Optical Phenomena ◽  
Thin Film Waveguides

High-bandwidth readout of optomechanical cavity sensors with electro-optic frequency combs

2020 ◽  
Author(s):  
Benjamin J. Reschovsky ◽  
David. A. Long ◽  
Yiliang Bao ◽  
Feng Zhou ◽  
Richard A. Allen ◽  
...  
Keyword(s):  
Frequency Combs ◽  
Electro Optic ◽  
High Bandwidth ◽  
Optomechanical Cavity

scholarly journals Growth of Nd:potassium gadolinium tungstate thin-film waveguides by pulsed laser deposition

2000 ◽  
Vol 76 (18) ◽  
pp. 2490-2492 ◽  
Author(s):  
P. A. Atanasov ◽  
R. I. Tomov ◽  
J. Perriére ◽  
R. W. Eason ◽  
N. Vainos ◽  
...  
Keyword(s):  
Thin Film ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Thin Film Waveguides
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