Investigation of Silicon-Germanium Films Deposited by Plasma-Enhanced Chemical Vapor Deposition Using Laser Assistance

2019 ◽  
Vol 3 (7) ◽  
pp. 197-206
Author(s):  
Ching-Ting Lee ◽  
Jun-Hung Cheng ◽  
Yao-Ming Chen ◽  
Tai-Cheng Tsai
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Silicon Germanium ◽  
Chemical Vapor ◽  
Germanium Films

Germanium-rich silicon-germanium films epitaxially grown by ultrahigh vacuum chemical-vapor deposition directly on silicon substrates

2007 ◽  
Vol 91 (25) ◽  
pp. 252111 ◽  
Author(s):  
Douglas D. Cannon ◽  
Jifeng Liu ◽  
David T. Danielson ◽  
Samerkhae Jongthammanurak ◽  
Uchechukwu U. Enuha ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Silicon Germanium ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Silicon Substrates ◽  
Germanium Films

Low-Temperature Epitaxial Growth of Silicon and Silicon-Germanium Alloy by Ultrahigh-Vacuum Chemical Vapor Deposition

1994 ◽  
Vol 33 (Part 1, No.1A) ◽  
pp. 240-246 ◽  
Author(s):  
Tz-Guei Jung ◽  
Chun-Yen Chang ◽  
Ting-Chang Chang ◽  
Horng-Chih Lin ◽  
Tom Wang ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Silicon Germanium ◽  
Ultrahigh Vacuum ◽  
Chemical Vapor ◽  
Germanium Alloy
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