Isolated Carbon Confinement Methodology for Ultrathin Boron Profiles with Enhanced Conductivity in Sub-50 NM Strained Layers of Silicon Germanium
1990 ◽
Vol 48
(4)
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pp. 668-669
1974 ◽
Vol 63
(2)
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pp. 159-165
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2001 ◽
Vol 171
(7)
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pp. 689
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