AbstractIn order to continuously improve the performances of microelectronics devices through scaling, SiO2 is being replaced by high-k materials as gate dielectric; metal gates are replacing poly-Si. This leads to increasingly more complex stacks. For future generations, the replacement of Si as a substrate by Ge and/or III/V material is also considered. This also increases the demand on the metrology tools as a thorough characterization, including composition and thickness is thus needed. Many different techniques exist for composition analysis. They usually require however large area for the analysis, complex instrumentation and can be time consuming. EDS (Energy Dispersive Spectroscopy) when coupled to Scanning Electron Microscopy (SEM) has the potential to allow fast analysis on small scale areas.In this work, we evaluate the possibilities of EDS for thin film analysis based on an intercomparison of composition analysis with different techniques. We show that using proper modeling, high quality quantitative composition and thickness of multilayers can be achieved.