Reactive Ion Etching of Lead Zirconate Titanate (PZT) Thin Film Capacitors

1993 ◽  
Vol 140 (9) ◽  
pp. 2635-2639 ◽  
Author(s):  
Dilip P. Vijay ◽  
Seshu B. Desu ◽  
W. Pan
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Reactive Ion Etching ◽  
Lead Zirconate ◽  
Ion Etching ◽  
Zirconate Titanate ◽  
Thin Film Capacitors ◽  
Pzt Thin Film

Correlations Among Degradations in Lead Zirconate Titanate thin Film Capacitors

1993 ◽  
Vol 310 ◽  
Author(s):  
In K. Yoo ◽  
Seshu B. Desu ◽  
Jimmy Xing
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Lead Zirconate Titanate ◽  
Oxygen Vacancies ◽  
Lead Zirconate ◽  
Electrical Degradation ◽  
Zirconate Titanate ◽  
Thin Film Capacitors ◽  
Pzt Thin Film ◽  
Degradation Properties

AbstractMany attempts have been made to reduce degradation properties of Lead Zirconate Titanate (PZT) thin film capacitors. Although each degradation property has been studied extensively for the sake of material improvement, it is desired that they be understood in a unified manner in order to reduce degradation properties simultaneously. This can be achieved if a common source(s) of degradations is identified and controlled. In the past it was noticed that oxygen vacancies play a key role in fatigue, leakage current, and electrical degradation/breakdown of PZT films. It is now known that space charges (oxygen vacancies, mainly) affect ageing, too. Therefore, a quantitative ageing mechanism is proposed based on oxygen vacancy migration under internal field generated by either remanent polarization or spontaneous polarization. Fatigue, leakage current, electrical degradation, and polarization reversal mechanisms are correlated with the ageing mechanism in order to establish guidelines for simultaneous degradation control of PZT thin film capacitors. In addition, the current pitfalls in the ferroelectric test circuit is discussed, which may cause false retention, imprint, and ageing.

Magnetically Enhanced Reactive Ion Etching of Lead Zirconate Titanate Thin Film by CHF3Plasma

2000 ◽  
Vol 39 (Part 1, No. 1) ◽  
pp. 320-323 ◽  
Author(s):  
Yin-yin Lin ◽  
Qin Liu ◽  
Ting-ao Tang ◽  
Xi Yao ◽  
Wei-ning Huang
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Reactive Ion Etching ◽  
Lead Zirconate ◽  
Ion Etching ◽  
Zirconate Titanate ◽  
Titanate Thin Film

Effects of Thermal Annealing on Lead Zirconate Titanate Thin Film Capacitors with Platinum Electrodes

2007 ◽  
Vol 154 (11) ◽  
pp. G251 ◽  
Author(s):  
Jiang-Li Cao ◽  
Axel Solbach ◽  
Yan Fang ◽  
Ulrich Boettger ◽  
Peter J. Schorn ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Annealing ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Platinum Electrodes ◽  
Zirconate Titanate ◽  
Thin Film Capacitors ◽  
Titanate Thin Film
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