Thermal Agglomeration of Ultrathin SOI and SSOI Films: A Quantitative Stability Study and Physical Model to Guide Ultrathin SOI Process Design
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2009 ◽
Vol 00
(00)
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pp. 090810023617078-10
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2014 ◽
Vol 4
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pp. 71-75
2017 ◽
Vol 25
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pp. 177-192
2020 ◽
Vol 140
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pp. 1-8
2014 ◽
Vol 21
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pp. 16-22
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2017 ◽
Vol 27
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pp. 707-722
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