Roles of Additives in Damascene Copper Electropolishing

2006 ◽  
Vol 153 (6) ◽  
pp. C428 ◽  
Author(s):  
Sue-Hong Liu ◽  
Jia-Min Shieh ◽  
Chih Chen ◽  
Karl Hensen ◽  
Shih-Song Cheng
Keyword(s):  
Copper Electropolishing

Rapid Preparation of Cross-Sectional TEM Samples from Electroplated Copper

1990 ◽  
Vol 199 ◽  
Author(s):  
T. E. Dinan ◽  
D. Landolt ◽  
P Ruterana ◽  
P.-A. Buffat
Keyword(s):  
Nitric Acid ◽  
Nickel Alloy ◽  
Crystalline Structure ◽  
Rapid Preparation ◽  
Cross Sectional ◽  
Copper Nickel ◽  
Area Of Interest ◽  
Copper Nickel Alloy ◽  
Electroplated Copper ◽  
Copper Electropolishing

ABSTRACTMethods were investigated for the rapid preparation of cross-sectional TEM samples from electroplated copper. Electropolishing and ultramicrotomy were used. The electropolished samples were sandwiched in a copper/nickel alloy and electropolished using a nitric acid/methanol mixture. Large transparent areas were obtained and it was possible to position the area of interest at the point where the hole would appear. Ultramicrotomed samples cut with 45° diamond knives were electron transparent but the crystalline structure of the sample was severely damaged. However, it was possible to identify the conditions by which good ultramicrotomed samples might be produced in the future.

scholarly journals Studying Copper Electropolishing Inhibition in Presence of Some Organic Alcohols

2016 ◽  
Vol 34 (2) ◽  
pp. 105-118 ◽  
Author(s):  
A A Attia ◽  
E M Elmelegy ◽  
M El-Batouti ◽  
A-M M Ahmed
Keyword(s):  
Copper Electropolishing

scholarly journals Physico-Chemical Studies of Almond Shell Extracts Potential on the Electropolishing and Electrorefining of Copper

2021 ◽  
Vol 33 (10) ◽  
pp. 2333-2340
Author(s):  
Fatma M. Abouzeid ◽  
Sultanah Alshammery
Keyword(s):  
Surface Texture ◽  
Electrochemical Process ◽  
Surface Irregularity ◽  
Kinetic Investigation ◽  
Sharp Decline ◽  
Almond Shell ◽  
Electrochemical Processes ◽  
Physico Chemical ◽  
Chemical Studies ◽  
Copper Electropolishing

Addition of almond shell extract to electrochemical process bath such as electropolishing and electrorefining of copper was investigated using potentiodynamic polarization and surface investigation. Addition of several concentrations of the extracts provide a sharp decline in electrorefining rate, but gave augmentation in electropolishing rate. Surfce investigation provided the confirmatory evidence of improved surface texture by almond shell extract addition to copper electropolishing and electrorefining electrolyte. Kinetic investigation and activated constraints were calculated for the electrochemical processes. A distinct improvement in the surface texture was observed where surface irregularity, roughness (Ra) diminishs from 0.95 to 0.43, 0.32, 0.22 and 0.06 μm in the presence of 25, 100, 150 and 200 ppm extract.

A Mechanistic Model for Copper Electropolishing in Phosphoric Acid

2008 ◽  
Vol 155 (1) ◽  
pp. D27 ◽  
Author(s):  
Julie Mendez ◽  
Rohan Akolkar ◽  
Tatyana Andryushchenko ◽  
Uziel Landau
Keyword(s):  
Phosphoric Acid ◽  
Mechanistic Model ◽  
Copper Electropolishing
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