Accurate Determination of Shallow Zn‐Diffusion Profiles in GaP and GaAs0.1 P 0.9 Using Anodic Oxidation and a Double Radioactive Tracer Technique

1977 ◽  
Vol 124 (3) ◽  
pp. 469-471 ◽  
Author(s):  
J. C. Verplanke
1968 ◽  
Vol 46 (6) ◽  
pp. 753-758 ◽  
Author(s):  
E. Formann ◽  
F. P. Viehböck ◽  
H. Wotke

Based on the hard-sphere potential approximation, angular distributions of scattered particles at different mass ratios M1:M2 were calculated. The results were compared with experiments carried out with the following atoms:[Formula: see text]The sputtered particles from the target as well as from the incident-ion beam were collected on graphite rods and measured by either activation analysis or a radioactive tracer technique.


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