Determination of Reactant Gas Concentration by Quadrupole Mass Analyzer during PSG Film Formation Using Organic Compounds

1976 ◽  
Vol 123 (9) ◽  
pp. 1410-1412 ◽  
Author(s):  
Takeo Yoshimi ◽  
Hideo Sakai ◽  
Katsuro Sugawara
1987 ◽  
Vol 58 (12) ◽  
pp. 2249-2255
Author(s):  
Deepak Nayak ◽  
Kambiz Pourrezaei ◽  
Michel Francois ◽  
Ali Bahasadri

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