Low Temperature, High Pressure Steam Oxidation of Silicon

1979 ◽  
Vol 126 (10) ◽  
pp. 1822-1824 ◽  
Author(s):  
L. E. Katz ◽  
B. F. Howells
1974 ◽  
Vol 21 (10) ◽  
pp. 636-640 ◽  
Author(s):  
R.J. Powell ◽  
J.R. Ligenza ◽  
M.S. Schneider

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