Low Temperature, High Pressure Steam Oxidation of Silicon
1979 ◽
Vol 126
(10)
◽
pp. 1822-1824
◽
Keyword(s):
2001 ◽
Vol 80
(7)
◽
pp. 1058-1062
◽
Keyword(s):
1974 ◽
Vol 21
(10)
◽
pp. 636-640
◽
Keyword(s):
2014 ◽
pp. 611-627
1978 ◽
Vol 17
(S1)
◽
pp. 223
◽