Semiconducting Zinc Oxide Films Prepared by Metal Organic Chemical Vapor Deposition from Diethyl Zinc

1981 ◽  
Vol 128 (12) ◽  
pp. 2684-2686 ◽  
Author(s):  
A. P. Roth ◽  
D. F. Williams
Keyword(s):  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Diethyl Zinc ◽  
Zinc Oxide Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Volatile, Monomeric, and Fluorine-Free Precursors for the Metal Organic Chemical Vapor Deposition of Zinc Oxide

2010 ◽  
Vol 2010 (9) ◽  
pp. 1366-1372 ◽  
Author(s):  
Daniela Bekermann ◽  
Detlef Rogalla ◽  
Hans-Werner Becker ◽  
Manuela Winter ◽  
Roland A. Fischer ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Metal-Organic Chemical Vapor Deposition of Metal Oxide Films and Nanostructures

2012 ◽  
pp. 291-336 ◽  
Author(s):  
Sanjay Mathur ◽  
Aadesh Pratap Singh ◽  
Ralf Müller ◽  
Tessa Leuning ◽  
Thomas Lehnen ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Metal Oxide ◽  
Vapor Deposition ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Oxide Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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