High Resolution Electron Beam Negative Resist with Very Narrow Molecular Weight Distributions
1982 ◽
Vol 129
(3)
◽
pp. 663-665
◽
1980 ◽
Vol 20
(16)
◽
pp. 1058-1063
◽
1996 ◽
Vol 54
◽
pp. 166-167
1968 ◽
Vol 25
(1)
◽
pp. 145-153
◽
Keyword(s):
1981 ◽
Vol 52
(4)
◽
pp. 482-494
◽
2006 ◽
Vol 11-12
◽
pp. 757-760