Chemical Etching of Ion Implanted Amorphous Silicon Carbide

1986 ◽  
Vol 133 (3) ◽  
pp. 650-652 ◽  
Author(s):  
J. A. Edmond ◽  
J. W. Palmour ◽  
R. F. Davis
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Chemical Etching ◽  
Amorphous Silicon Carbide ◽  
Ion Implanted

RBS and optical studies of ion-implanted amorphous silicon carbide layers

Vacuum ◽  
2003 ◽  
Vol 70 (2-3) ◽  
pp. 457-465
Author(s):  
J. Romanek ◽  
A.P. Kobzev ◽  
M. Kulik ◽  
T. Tsvetkova ◽  
J. Żuk
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Optical Studies ◽  
Amorphous Silicon Carbide ◽  
Ion Implanted

Near-field optical mapping of the ion-implanted patterns fabricated in amorphous silicon carbide

Vacuum ◽  
2005 ◽  
Vol 79 (1-2) ◽  
pp. 94-99 ◽  
Author(s):  
T. Tsvetkova ◽  
S. Takahashi ◽  
A. Zayats ◽  
P. Dawson ◽  
R. Turner ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Optical Mapping ◽  
Near Field ◽  
Amorphous Silicon Carbide ◽  
Ion Implanted

Optical contrast in ion-implanted amorphous silicon carbide nanostructures

2007 ◽  
Vol 40 (23) ◽  
pp. 7492-7496 ◽  
Author(s):  
S Takahashi ◽  
P Dawson ◽  
A V Zayats ◽  
L Bischoff ◽  
O Angelov ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Optical Contrast ◽  
Amorphous Silicon Carbide ◽  
Ion Implanted

Structural relaxation of amorphous silicon carbide thin films in thermal annealing

2008 ◽  
Vol 516 (12) ◽  
pp. 3855-3861 ◽  
Author(s):  
Kun Xue ◽  
Li-Sha Niu ◽  
Hui-Ji Shi ◽  
Jiwen Liu
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Thermal Annealing ◽  
Structural Relaxation ◽  
Amorphous Silicon Carbide

Ion beam effects on the hydrogenated bonds of amorphous silicon carbide

2000 ◽  
Vol 166-167 ◽  
pp. 404-409 ◽  
Author(s):  
P. Musumeci ◽  
L. Calcagno ◽  
A. Makhtari ◽  
P. Baeri ◽  
G. Compagnini ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Amorphous Silicon ◽  
Ion Beam ◽  
Amorphous Silicon Carbide
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