On Three‐Dimensional Transport Phenomena in CVD Processes
1987 ◽
Vol 134
(10)
◽
pp. 2552-2559
◽
2008 ◽
Vol 07
(02n03)
◽
pp. 103-112
◽
2014 ◽
Vol 2014
(0)
◽
pp. _1407-1_-_1407-2_
2008 ◽
Vol 33
(1)
◽
pp. 156-164
◽
Keyword(s):
2003 ◽
Vol 46
(5)
◽
pp. 809-821
◽
Keyword(s):
2004 ◽
Vol 34
(2)
◽
pp. 217-224
◽
1997 ◽
Vol 23
(7)
◽
pp. 111
Keyword(s):