A New Technique for Determination of Tensile Stress in Thin Films
1989 ◽
Vol 136
(5)
◽
pp. 1566-1568
◽
1993 ◽
Vol 16
(2)
◽
pp. 63-70
◽
Keyword(s):
1997 ◽
Vol 12
(11)
◽
pp. 1967-1974
◽
1988 ◽
Vol 3
(5)
◽
pp. 931-942
◽
Keyword(s):
1993 ◽
Vol 57
(2)
◽
pp. 475-482
◽
Keyword(s):