Analysis of Interface States between Plasma‐CVD Silicon Nitride and Silicon‐Substrate Using Deep‐Level Transient Spectroscopy

1990 ◽  
Vol 137 (9) ◽  
pp. 2974-2979 ◽  
Author(s):  
Akira Sanjoh ◽  
Naoki Ikeda ◽  
Kenji Komaki ◽  
Akira Shintani
Keyword(s):  
Silicon Nitride ◽  
Silicon Substrate ◽  
Deep Level Transient Spectroscopy ◽  
Deep Level ◽  
Interface States ◽  
Plasma Cvd ◽  
Transient Spectroscopy

A deep-level transient spectroscopy study of silicon interface states using different silicon nitride surface passivation schemes

2010 ◽  
Vol 96 (10) ◽  
pp. 103507 ◽  
Author(s):  
Chun Gong ◽  
Eddy Simoen ◽  
Niels Posthuma ◽  
Emmanuel Van Kerschaver ◽  
Jef Poortmans ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Deep Level Transient Spectroscopy ◽  
Surface Passivation ◽  
Deep Level ◽  
Interface States ◽  
Spectroscopy Study ◽  
Transient Spectroscopy ◽  
Silicon Interface

A Deep-Level Transient Spectroscopy Comparison of the SiO2/Si and Al2O3/Si Interface States

2019 ◽  
Vol 41 (4) ◽  
pp. 37-44 ◽  
Author(s):  
Eddy Simoen ◽  
Aude Rothschild ◽  
Bart Vermang ◽  
Jef Poortmans ◽  
Robert Mertens
Keyword(s):  
Deep Level Transient Spectroscopy ◽  
Deep Level ◽  
Interface States ◽  
Transient Spectroscopy

Deep-Level Transient Spectroscopy of Interface States in ZnO/PrCoOx/ZnO Thin-Film Junctions

1992 ◽  
Vol 31 (Part 2, No. 10A) ◽  
pp. L1429-L1431 ◽  
Author(s):  
Yoshihiko Yano ◽  
Yukihiko Shirakawa ◽  
Hisao Morooka
Keyword(s):  
Thin Film ◽  
Deep Level Transient Spectroscopy ◽  
Deep Level ◽  
Interface States ◽  
Zno Thin Film ◽  
Transient Spectroscopy
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