Development of Techniques for Real‐Time Monitoring and Control in Plasma Etching: II . Multivariable Control System Analysis of Manipulated, Measured, and Performance Variables

1991 ◽  
Vol 138 (9) ◽  
pp. 2727-2735 ◽  
Author(s):  
S. W. Butler ◽  
K. J. McLaughlin ◽  
T. F. Edgar ◽  
I. Trachtenberg
Keyword(s):  
Control System ◽  
Real Time ◽  
Plasma Etching ◽  
System Analysis ◽  
Multivariable Control ◽  
Monitoring And Control ◽  
Real Time Monitoring ◽  
Performance Variables ◽  
And Performance ◽  
And Control

Real-Time Monitoring and Control of Plasma Etching

1998 ◽  
Vol 37 (Part 1, No. 4B) ◽  
pp. 2381-2387 ◽  
Author(s):  
Moshe Sarfaty ◽  
Chris Baum ◽  
Michael Harper ◽  
Noah Hershkowitz ◽  
Juda L. Shohet
Keyword(s):  
Real Time ◽  
Plasma Etching ◽  
Monitoring And Control ◽  
Real Time Monitoring ◽  
And Control

Real-Time Monitoring and Automatic Control for Aerosol Cultivation of Lettuce

2014 ◽  
Vol 678 ◽  
pp. 299-304
Author(s):  
Bao Guo Yao ◽  
Zhe Feng Zhang
Keyword(s):  
Control System ◽  
Automatic Control ◽  
Real Time ◽  
Nutrient Solution ◽  
Control Method ◽  
Ph Value ◽  
Agricultural Science ◽  
Monitoring And Control ◽  
Real Time Monitoring ◽  
And Control

The automatic monitoring and control method for aerosol cultivation of lettuce was proposed by real-time monitoring and automatic control of the cultivation environment, on-line detection and automatic control of nutrient solution, and the combination of field control and remote control, which has realized the intelligent management of aerosol cultivation of lettuce based on plant factory. The monitoring and control system of aerosol cultivation, the control model for the spray frequency of nutrient solution and the fuzzy control method for the pH value control of nutrient solution were introduced. The control system has been applied in the agricultural science and technology park, and the results show that the aerosol cultivation of lettuce has advantages over the traditional method.

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