The Hydrogen Content and Properties of SiO2 Films Deposited from Tetraethoxysilane at 27 MHz in Various Gas Mixtures

1991 ◽  
Vol 138 (7) ◽  
pp. 2042-2046 ◽  
Author(s):  
M. G. J. Vepřek‐Heijman ◽  
D. Boutard
Keyword(s):  
Hydrogen Content ◽  
Gas Mixtures ◽  
Sio2 Films

Nitrogen and hydrogen content, morphology and phase composition of hot filament chemical vapor deposited diamond films from NH3/CH4/H2 gas mixtures

2017 ◽  
Vol 638 ◽  
pp. 264-268 ◽  
Author(s):  
Sh. Cherf ◽  
M. Chandran ◽  
Sh. Michaelson ◽  
S. Elfimchev ◽  
R. Akhvlediani ◽  
...  
Keyword(s):  
Phase Composition ◽  
Hydrogen Content ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Gas Mixtures ◽  
Chemical Vapor Deposited ◽  
Hot Filament
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