A Transmission Electron Microscopy Study of Process‐Induced Defects in Submicron SOI Structures

N. David Theodore; Susanne C. Arney; C. Barry Carter; Noel C. MacDonald

doi:10.1149/1.2069188

A Transmission Electron Microscopy Study of Process‐Induced Defects in Submicron SOI Structures

Journal of The Electrochemical Society ◽

10.1149/1.2069188 ◽

1992 ◽

Vol 139 (1) ◽

pp. 290-296 ◽

Cited By ~ 5

Author(s):

N. David Theodore ◽

Susanne C. Arney ◽

C. Barry Carter ◽

Noel C. MacDonald

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron ◽

Induced Defects

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An optical and transmission electron microscopy study of deformation-induced defects in 6H-SiC

Philosophical Magazine A ◽

10.1080/014186198253480 ◽

1998 ◽

Vol 78 (3) ◽

pp. 737-746

Author(s):

A.V. Samant X. L.Wei P. Pirouz

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron ◽

Induced Defects

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Transmission electron microscopy study in-situ of radiation-induced defects in copper at elevated temperatures

10.2172/432996 ◽

1996 ◽

Author(s):

T.L. Daulton ◽

M.A. Kirk ◽

L.E. Rehn

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Elevated Temperatures ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron ◽

Radiation Induced ◽

Induced Defects

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Transmission Electron Microscopy Study of Implantation Induced Defects in Gold

Applications of Ion Beams to Metals ◽

10.1007/978-1-4684-2079-1_36 ◽

1974 ◽

pp. 459-467 ◽

Cited By ~ 1

Author(s):

M. O. Ruault ◽

B. Jouffrey ◽

J. Chaumont ◽

H. Bernas

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron ◽

Induced Defects

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An optical and transmission electron microscopy study of deformation-induced defects in 6H-SiC

Philosophical Magazine A ◽

10.1080/01418619808241933 ◽

1998 ◽

Vol 78 (3) ◽

pp. 737-746 ◽

Cited By ~ 5

Author(s):

A. V. Samant ◽

X. L. Wei ◽

P. Pirouz

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron ◽

Induced Defects

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High-resolution transmission electron microscopy study of defects and interfaces in epitaxial TiO 2 films on sapphire and LaAlO 3

Philosophical Magazine A ◽

10.1080/01418610110087291 ◽

2002 ◽

Vol 82 (4) ◽

pp. 735-749 ◽

Cited By ~ 3

Author(s):

J. Y.Huang ◽

B. H. Park ◽

David Jan ◽

X. Q. Pan ◽

Yuntian T. Zhu ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

High Resolution ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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A SCANNING AND TRANSMISSION ELECTRON MICROSCOPY STUDY OF POOL BOILING SURFACES

10.1615/ihtc4.140 ◽

1970 ◽

Cited By ~ 2

Author(s):

G. H. Nix ◽

R.I. Vachon ◽

D. M. Hall

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Pool Boiling ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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Transmission electron microscopy study of a precipitate which forms in the Al-Mg-Si system

Philosophical Magazine Letters ◽

10.1080/095008396180407 ◽

1996 ◽

Vol 74 (2) ◽

pp. 57-66 ◽

Cited By ~ 34

Author(s):

L. Sagalowicz ◽

G. Lapasset ◽

G. Hug

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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In Situ Scanning Transmission Electron Microscopy Study of MoS2 Formation on Graphene with a Deep-Learning Framework

ACS Omega ◽

10.1021/acsomega.1c03002 ◽

2021 ◽

Author(s):

Yeongdong Lee ◽

Jongyeong Lee ◽

Handolsam Chung ◽

Jaemin Kim ◽

Zonghoon Lee

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Scanning Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Learning Framework ◽

Transmission Electron ◽

Scanning Transmission

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In Situ Transmission Electron Microscopy Study on the Deformation Responses of Additively Manufactured Multiphase Ni-based Superalloy

Microscopy and Microanalysis ◽

10.1017/s1431927620019571 ◽

2020 ◽

Vol 26 (S2) ◽

pp. 1844-1846

Author(s):

Qianying Guo ◽

Michael M. Kirka ◽

Kinga A. Unocic

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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An in-situ and ex-situ transmission electron microscopy study of the substrate orientational dependence of the solid-phase epitaxial growth of amorphized GaAs

1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings ◽

10.1109/commad.1996.610160 ◽

2002 ◽

Author(s):

K.B. Belay ◽

M.C. Ridgway ◽

D.J. Llewellyn

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Epitaxial Growth ◽

Solid Phase ◽

Microscopy Study ◽

Electron Microscopy Study ◽

Ex Situ ◽

Transmission Electron Microscopy Study ◽

Transmission Electron

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