Abnormal High Rate Deposition of TiN films by the Radio Frequency Plasma Jet System

1995 ◽  
Vol 142 (3) ◽  
pp. 883-887 ◽  
Author(s):  
H. Baránková ◽  
L. Bárdoš ◽  
S. Berg
Keyword(s):  
Radio Frequency ◽  
Plasma Jet ◽  
High Rate ◽  
Radio Frequency Plasma ◽  
Tin Films ◽  
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Cu-doped SiOxCy nanostructures induced by radio frequency plasma jet using hexamethyldisiloxane

2011 ◽  
Vol 258 (3) ◽  
pp. 1149-1152
Author(s):  
B. Ke ◽  
M.D. Chen ◽  
F. Ding ◽  
S.J. Zheng ◽  
H. Li ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Plasma Jet ◽  
Radio Frequency Plasma ◽  
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scholarly journals On diagnostics of annular-shape radio-frequency plasma jet operating in argon in atmospheric conditions

2020 ◽  
Vol 29 (3) ◽  
pp. 035027
Author(s):  
Ivana Sremački ◽  
Andrea Jurov ◽  
Martina Modic ◽  
Uroš Cvelbar ◽  
Lei Wang ◽  
...  
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Radio Frequency ◽  
Plasma Jet ◽  
Radio Frequency Plasma ◽  
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Use of a radio frequency plasma jet in chemical synthesis

AIChE Journal ◽  
1965 ◽  
Vol 11 (2) ◽  
pp. 370-384 ◽  
Author(s):  
C. S. Stokes ◽  
J. J. Correa ◽  
L. A. Streng ◽  
H. W. Leutner
Keyword(s):  
Chemical Synthesis ◽  
Radio Frequency ◽  
Plasma Jet ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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