Investigation of Boron Diffusion into Silicon Using a Liquid Boron Tribromide Source and Its Application to Buried-Gate-Type Static-Induction Thyristors
2005 ◽
Vol 152
(8)
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pp. G601
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1988 ◽
Vol 24
(1)
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pp. 132-136
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2013 ◽
Vol 336-338
◽
pp. 1445-1448
2013 ◽
Vol 303-306
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pp. 1803-1807