Silanol Concentration Depth Profiling during Plasma Deposition of SiO2 Using Multiple Internal Reflection Infrared Spectroscopy

1997 ◽  
Vol 144 (11) ◽  
pp. 3963-3967 ◽  
Author(s):  
Sang M. Han ◽  
Eray S. Aydil
Keyword(s):  
Infrared Spectroscopy ◽  
Plasma Deposition ◽  
Depth Profiling ◽  
Internal Reflection

Depth Profiling of Stratified Layers Using Variable-Angle ATR

1996 ◽  
Vol 50 (8) ◽  
pp. 1082-1088 ◽  
Author(s):  
Robert A. Shick ◽  
Jack L. Koenig ◽  
Hatsuo Ishida
Keyword(s):  
Fourier Transform ◽  
Infrared Spectroscopy ◽  
Fourier Transform Infrared Spectroscopy ◽  
Depth Profile ◽  
Molecular Level ◽  
Depth Profiling ◽  
Internal Reflection ◽  
Attenuated Total Reflectance ◽  
Total Reflectance ◽  
Variable Angle

It is shown that variable-angle attenuated total reflectance Fourier transform infrared spectroscopy is a viable technique to recover depth profile information on the molecular level. A number of known step profiles are measured to determine the limits of applicability for this method. Thickness results obtained by using the internal reflection technique are compared with thickness determination with the use of a profilometer.

Infrared spectroscopy of highk thin layer by multiple internal reflection and attenuated total reflection

2003 ◽  
Vol 0 (8) ◽  
pp. 2961-2965 ◽  
Author(s):  
N. Rochat ◽  
K. Dabertrand ◽  
V. Cosnier ◽  
S. Zoll ◽  
P. Besson ◽  
...  
Keyword(s):  
Infrared Spectroscopy ◽  
Thin Layer ◽  
Total Reflection ◽  
Attenuated Total Reflection ◽  
Internal Reflection

Integration of Multiple Internal Reflection (MIR) Infrared Spectroscopy with Silicon-based Chemical Microreactors

2001 ◽  
pp. 345-346
Author(s):  
R. J. Jackman ◽  
K. T. Queeney ◽  
R. Herzig-Marx ◽  
M. A. Schmidt ◽  
K. F. Jensen
Keyword(s):  
Infrared Spectroscopy ◽  
Internal Reflection ◽  
Silicon Based

Attenuated Total Internal Reflection Infrared Microspectroscopy For The Study Of Trace Contaminants In Aqueous Solutions.

1999 ◽  
Vol 5 (S2) ◽  
pp. 66-67
Author(s):  
Andre’ J. Sommer ◽  
Mark Hardgrove
Keyword(s):  
Infrared Spectroscopy ◽  
Total Internal Reflection ◽  
Molecular Spectroscopy ◽  
Internal Reflection ◽  
Small Samples ◽  
Attenuated Total Internal Reflection ◽  
Infrared Microspectroscopy ◽  
Transmission Measurements ◽  
Major Emphasis

Over the past several years many developments have taken place in the field of molecular spectroscopy. For Raman spectroscopy many of the improvements have arisen from technological innovations that include diode-based lasers, holographic notch filters and charged coupled detectors. In contrast, a majority of the developments in infrared spectroscopy have been in the area of new sampling accessories. A major emphasis has been placed on attenuated total internal reflection (ATR) accessories. The devices are allowing infrared spectroscopy to be employed in process control environments and quality control laboratories where the method is not only robust but has the advantages of limited sample preparation and/or in situ analysis.In the realm of microspectroscopy, ATR accessories have the added advantages of providing better spatial resolution, equal to or higher S/N for equivalent sample size compared to transmission measurements and most importantly the ability to collect spectra of small samples without the adverse effect of diffraction. One accessory which was developed several years ago is known as the Split-Pea.

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