Plasma Etching Endpointing by Monitoring Radio‐Frequency Power Systems with an Artificial Neural Network
1996 ◽
Vol 143
(6)
◽
pp. 2029-2035
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1991 ◽
Vol 111
(7)
◽
pp. 735-742
Keyword(s):
Keyword(s):
2017 ◽
Vol 87
◽
pp. 43-51
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Keyword(s):
2018 ◽
Vol 43
(6)
◽
pp. 979-985
Keyword(s):
2012 ◽
pp. 155-170