A Time-Dependent Transport-Kinetics Model for Additive Interactions in Copper Interconnect Metallization
2004 ◽
Vol 151
(11)
◽
pp. C702
◽
Keyword(s):
2012 ◽
Vol 61
(2-3)
◽
pp. 305-316
◽
1957 ◽
Vol 10
(4)
◽
pp. 567-582
◽
2014 ◽
Vol 118
(34)
◽
pp. 20009-20017
◽
2012 ◽
Vol 14
(5)
◽
pp. 053024
◽
1994 ◽
Vol 27
(6)
◽
pp. 1184-1192
◽