Experimental and Theoretical Investigation of Heating and Convection in Copper Polishing
2004 ◽
Vol 151
(9)
◽
pp. G559
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1988 ◽
Vol 49
(C8)
◽
pp. C8-101-C8-102
Keyword(s):
1997 ◽
Vol 7
(4)
◽
pp. 417-436
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2014 ◽
Vol 5
(1-4)
◽
pp. 199-206
Keyword(s):