Investigation of Nonstationary Transport and Quantum Effects in Realistic Deep Submicrometer Partially Depleted SOI Technology

2002 ◽  
Vol 5 (5) ◽  
pp. G29 ◽  
Author(s):  
D. Munteanu ◽  
G. Le Carval ◽  
C. Fenouillet-Béranger ◽  
O. Faynot
1984 ◽  
Vol 144 (9) ◽  
pp. 3 ◽  
Author(s):  
Yurii M. Tsipenyuk ◽  
Yu.B. Ostapenko ◽  
G.N. Smirenkin ◽  
A.S. Soldatov

2018 ◽  
Vol 189 (06) ◽  
pp. 659-664
Author(s):  
Sergei M. Stishov
Keyword(s):  

Author(s):  
Sergei E. Kuratov ◽  
Dmitry S. Shidlovski ◽  
Sergei I. Blinnikov ◽  
Sergey Yu. Igashov

2020 ◽  
Vol 63 (11) ◽  
pp. 586-595
Author(s):  
Alexander Korotkov ◽  
Dmitry Morozov ◽  
Mikhail Pilipko ◽  
Mikhail Yenuchenko

Author(s):  
Z. G. Song ◽  
S. K. Loh ◽  
X. H. Zheng ◽  
S.P. Neo ◽  
C. K. Oh

Abstract This article presents two cases to demonstrate the application of focused ion beam (FIB) circuit edit in analysis of memory failure of silicon on insulator (SOI) devices using XTEM and EDX analyses. The first case was a single bit failure of SRAM units manufactured with 90 nm technology in SOI wafer. The second case was the whole column failure with a single bit pass for a SRAM unit. From the results, it was concluded that FIB circuit edit and electrical characterization is a good methodology for further narrowing down the defective location of memory failure, especially for SOI technology, where contact-level passive voltage contrast is not suitable.


Author(s):  
K. Dickson ◽  
G. Lange ◽  
K. Erington ◽  
J. Ybarra

Abstract This paper describes the use of Electron Beam Absorbed Current (EBAC) mapping performed from the back side of the device as a means of locating metallization defects on flip chip 45nm SOI technology.


Sign in / Sign up

Export Citation Format

Share Document