Nano‐ and Macropore Formation in p‐Type Silicon

1999 ◽  
Vol 146 (9) ◽  
pp. 3309-3314 ◽  
Author(s):  
R. B. Wehrspohn ◽  
F. Ozanam ◽  
J. ‐N. Chazalviel
Keyword(s):  
Type Silicon ◽  
P Type ◽  
Macropore Formation

Random and Ordered Macropore Formation in p-Type Silicon

2002 ◽  
Vol 149 (1) ◽  
pp. G70 ◽  
Author(s):  
A. Vyatkin ◽  
V. Starkov ◽  
V. Tzeitlin ◽  
H. Presting ◽  
J. Konle ◽  
...  
Keyword(s):  
Type Silicon ◽  
P Type ◽  
Ordered Macropore ◽  
Macropore Formation

scholarly journals Macropore formation in p-type silicon: toward the modeling of morphology

2014 ◽  
Vol 9 (1) ◽  
Author(s):  
Amel Slimani ◽  
Aicha Iratni ◽  
Hervé Henry ◽  
Mathis Plapp ◽  
Jean-Noël Chazalviel ◽  
...  
Keyword(s):  
Type Silicon ◽  
P Type ◽  
Macropore Formation

scholarly journals Pore Morphology of Heavily Doped P-Type Porous Silicon

Proceedings ◽  
2018 ◽  
Vol 4 (1) ◽  
pp. 14 ◽  
Author(s):  
David Martín-Sánchez ◽  
Salvador Ponce-Alcántara ◽  
Jaime García-Rupérez
Keyword(s):  
Porous Silicon ◽  
Organic Solvent ◽  
Potassium Hydroxide ◽  
Pore Diameter ◽  
Strong Dependence ◽  
Pore Morphology ◽  
Type Silicon ◽  
Heavily Doped ◽  
P Type ◽  
Macropore Formation

Tuning the pore diameter of porous silicon (PS) is essential for some applications such as biosensing, where the pore size can filter the entrance of some analytes or increase its sensitivity. However, macropore (>50 nm) formation on p-type silicon is still poorly known due to the strong dependence on resistivity. Electrochemically etching heavily doped p-type silicon usually forms micropores (<5 nm), but it has been found that bigger sizes can be achieved by adding an organic solvent to the electrolyte. In this work, we present the results of using dimethylformamide (DMF), dimethylsulfoxide (DMSO), potassium hydroxide (KOH) and sodium hydroxide (NaOH) for macropore formation in p-type silicon with a resistivity between 0.001 and 0.02 Ω∙cm, achieving pore sizes from 5 to 100 nm.

Random Macropore Formation in p-Type Silicon in HF-Containing Organic Solutions

2005 ◽  
Vol 152 (4) ◽  
pp. C213 ◽  
Author(s):  
Farid A. Harraz ◽  
Kentaro Kamada ◽  
Katsutoshi Kobayashi ◽  
Tetsuo Sakka ◽  
Yukio H. Ogata
Keyword(s):  
Type Silicon ◽  
Organic Solutions ◽  
P Type ◽  
Macropore Formation

Macropore Formation on Medium Doped p-Type Silicon

2000 ◽  
Vol 182 (1) ◽  
pp. 17-21 ◽  
Author(s):  
S. Lust ◽  
C. L�vy-Cl�ment
Keyword(s):  
Type Silicon ◽  
P Type ◽  
Macropore Formation

Macropore Formation in Prepatterned p-type Silicon

2019 ◽  
Vol 16 (3) ◽  
pp. 291-297
Author(s):  
Jae Hyun Kim ◽  
K Phil Kim ◽  
Hong-Seok Seo ◽  
Hong-Keun Lyu ◽  
Sung-Ho Woo ◽  
...  
Keyword(s):  
Type Silicon ◽  
P Type ◽  
Macropore Formation

The Physics of Macropore Formation in Low‐Doped p‐Type Silicon

1999 ◽  
Vol 146 (8) ◽  
pp. 2968-2975 ◽  
Author(s):  
V. Lehmann ◽  
S. Ronnebeck
Keyword(s):  
Type Silicon ◽  
P Type ◽  
Macropore Formation
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